High Speed Mach Zehnder Modulator with Low Series Resistance Phase Shifter Loaded in Traveling Wave Electrode

Kai Ning Ku, Po Chih Chang, Chung Chih Wang, Chen Yu Lin, Chi Hsiang Hsu, Ting Hui Chen, Chien Ying Huang, Chi Sen Lee, Yu Fang Chen, Kai Wei Chou, Shang Chun Chen, Ming Chang Lee, Chien Chung Lin, Mu Tao Chu, Chih I. Wu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This research presents the design and characterization of the traveling wave Mach Zehnder modulator loaded L-shaped PN junction phase shifter at 72.8 Gbps data-rate. We propose a new structure of phase shifter with low series resistance meanwhile maintaining the FOM with low VπL (0.9 V-cm) and optical absorption.

Original languageEnglish
Title of host publication25th Opto-Electronics and Communications Conference, OECC 2020
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728154459
DOIs
StatePublished - 4 Oct 2020
Event25th Opto-Electronics and Communications Conference, OECC 2020 - Taipei, Taiwan
Duration: 4 Oct 20208 Oct 2020

Publication series

Name25th Opto-Electronics and Communications Conference, OECC 2020

Conference

Conference25th Opto-Electronics and Communications Conference, OECC 2020
CountryTaiwan
CityTaipei
Period4/10/208/10/20

Keywords

  • modulator
  • optical interconnect
  • silicon photonics

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