High quality YBa2Cu3O7 Josephson junctions made by direct electron beam writing

S. K. Tolpygo*, S. Shokhor, B. Nadgorny, Jiunn-Yuan Lin, M. Gurvitch, A. Bourdillon, S. Y. Hou, Julia M. Phillips

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

40 Scopus citations


High-Tc Josephson junctions have been fabricated by direct electron beam writing over YBa2Cu3O7 thin-film microbridges, using scanning transmission electron microscope (STEM) with an accelerating voltage of 80-120 kV. Annealing at 330-380 K increases T c and Ic of the junctions and makes them more stable. In the operating range of a few degrees below Tc, the junctions show 100% magnetic field modulation of the critical current, microwave-induced Shapiro steps oscillating according to the resistively shunted junction (RSJ) model, and RSJ current-voltage characteristics with IcRn product up to 0.5-0.6 mV at 75 K and 0.3 mV at 77 K.

Original languageEnglish
Pages (from-to)1696-1698
Number of pages3
JournalApplied Physics Letters
Issue number12
StatePublished - 1 Dec 1993

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