High quality factor nonpolar GaN photonic crystal nanocavities

Tzeng Tsong Wu, Sheng Yun Lo, Huei Min Huang, Che Wei Tsao, Tien-chang Lu, Shing Chung Wang

Research output: Contribution to journalArticlepeer-review

12 Scopus citations


High quality factor a-plane nonpolar GaN two-dimensional photonic crystal (PC) nanocavities on r-plane sapphire substrates have been demonstrated. Nonpolar GaN PC nanocavities on a thin membrane structure were realized by using e-beam lithography to define the PC patterns and focused-ion beam milling to fabricate the suspended thin membrane. A dominant resonant mode at 388 nm with a high quality factor of approximately 4300 has been demonstrated at 77 K by the micro-photoluminescence system. Moreover, the degree of polarization of the emission from the non-polar GaN PC nanocavity was measured to be 64 along the m crystalline direction.

Original languageEnglish
Article number191116
JournalApplied Physics Letters
Issue number19
StatePublished - 13 May 2013

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