High Q broadband copper spiral inductors with Q=45 on proton-bombarded semi-insulating silicon substrate

Heng Ming Hsu, Jiong Guang Su, Yo Sheng Lin, Ming Hao Tseng, Jason Chih Hsien Lin, Jack Yuan Chen Sun, Denny Tang, Tsing Tyan Yang, Ting Sien Tu, Li Fu Lin

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

9 Scopus citations

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Engineering & Materials Science