High precision eddy current damped electromagnetic positioner with flexure-suspension

Chih Hsien Lin, Shao-Kang Hung, Sang Tsung Li, Li Chen Fu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations

Abstract

This paper proposes a novel high precision planar electromagnetic-actuated positioning stage. The movable part of the stage is suspended by a monolithic parallel flexure mechanism, which motion comes from the deformation of the structure itself. A linear electromagnetic actuator which consists of a near-uniform magnetic field and four coils is designed and implementation to provide the propelling force for translational and rotational motions. An eddy current damper is designed and integrated with the electromagnetic actuator to suppress the vibration of the flexure, whose non-contact property is more advanced than the contact damper used in our previous researches. The design traveling range is 3mm × 3mm in planar motion. A 3-axis laser interferometer measurement system is utilized to feedback the position and posture information of the moving stage. The experimental results show the vibration of the flexure mechanism could be suppressed by the designed eddy current damper. The results also show the regulation and tracking performance by a well-designed robust adaptive sliding mode controller, which can overcome the disturbance and modeling uncertainty and guarantee a satisfactory performance.

Original languageEnglish
Title of host publication2009 IEEE International Conference on Control Applications, CCA '09
Pages1568-1573
Number of pages6
DOIs
StatePublished - 1 Dec 2009
Event2009 IEEE International Conference on Control Applications, CCA '09 - Saint Petersburg, Russian Federation
Duration: 8 Jul 200910 Jul 2009

Publication series

NameProceedings of the IEEE International Conference on Control Applications

Conference

Conference2009 IEEE International Conference on Control Applications, CCA '09
CountryRussian Federation
CitySaint Petersburg
Period8/07/0910/07/09

Keywords

  • Electromagnetic force actuation
  • Parallel flexure mechanism
  • Passive vibration suppression
  • Precision motion control

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  • Cite this

    Lin, C. H., Hung, S-K., Li, S. T., & Fu, L. C. (2009). High precision eddy current damped electromagnetic positioner with flexure-suspension. In 2009 IEEE International Conference on Control Applications, CCA '09 (pp. 1568-1573). [5280935] (Proceedings of the IEEE International Conference on Control Applications). https://doi.org/10.1109/CCA.2009.5280935