High-power and single-mode VCSEL arrays with single-polarized outputs by using package-induced tensile strain

Jin-Wei Shi*, Zuhaib Khan, Ray-Hua Horng, Hsiao-Yun Yeh, Chun-Kai Huang, Cheng-Yi Liu, Jie-Chen Shih, Yung-Hao Chang, Jia-Liang Yen, Jinn-Kong Sheu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review


In this work, we demonstrate a novel high-power vertical-cavity surface-emitting laser (VCSEL) array with highly single-mode (SM) and single-polarized output performance without significantly increasing the intra-cavity loss and threshold current (Ith). By combining a low-loss zinc-diffusion aperture with an electroplated copper substrate, we can obtain a highly SM output (side mode suppression ratio >50 dB) with a wry narrow divergence angle (1 / e(2) : similar to 10 degrees) under high output power (3.1 W; 1% duty cycle) and sustain a single polarization state, with a polarization suppression ratio of around 9 dB, under the full range of bias currents. Compared to the reference device without the copper substrate, the demonstrated array can not only switch the output optical spectra from quasi-SM to highly SM but also maintain a close threshold current value (Ith: 0.8 versus 0.7 mA per unit device) and slope efficiency. The enhancement in fundamental mode selectivity of our VCSEL structure can be attributed to the single-polarized lasing mode induced by tensile strain, which is caused by the electroplated copper substrate, as verified by the double-crystal x-ray measurement results. (C) 2020 Optical Society of America

Original languageEnglish
Pages (from-to)4839-4842
Number of pages4
JournalOptics Letters
Issue number17
StatePublished - 1 Sep 2020


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