High-performance vertically stacked bottom-gate and top-gate polycrystalline silicon thin-film transistors for three-dimensional integrated circuits

I. Che Lee*, Tsung Che Tsai, Chun Chien Tsai, Po Yu Yang, Chao Lung Wang, Huang-Chung Cheng

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

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