By using a newly proposed structure of the multi-via MIM capacitor, amorphous Ta2O5 films were investigated. Amorphous Ta2O5 with our proposed structure is one of the suitable combinations for the capacitors for RF analog applications.
|Number of pages||4|
|State||Published - 1999|
|Event||Proceedings of the 1999 IEEE Bipolar/BiCMOS Circuits and Technology Meeting (BCTM 1999) - Minneapolis, MN, USA|
Duration: 26 Sep 1999 → 28 Sep 1999
|Conference||Proceedings of the 1999 IEEE Bipolar/BiCMOS Circuits and Technology Meeting (BCTM 1999)|
|City||Minneapolis, MN, USA|
|Period||26/09/99 → 28/09/99|