High-performance germanium thin-film transistors with single-crystal-like channel via continuous-wave laser crystallization

Yi Shao Li*, Chun Yi Wu, Chan Yu Liao, Wen Hsien Huang, Jia Min Shieh, Chia Hsin Chou, Kai Chi Chuang, Jun Dao Luo, Wei Shuo Li, Huang-Chung Cheng

*Corresponding author for this work

Research output: Contribution to journalArticle

5 Scopus citations

Abstract

This letter reports of the fabrication of high-performance p-channel polycrystalline germanium (poly-Ge) thin-film transistors (TFTs) using continuous-wave laser crystallization (CLC). During the CLC process, the direction of crystallization matches the direction of laser scanning due to a strong temperature gradient in the melting region. This makes it possible to fabricate high-quality poly-Ge thin films with 1-D longitudinal grains as large as 2 μ m × 20 μm. We fabricated the proposed p-channel CLC Ge TFTs with channel width of 0.7 μm and a channel length each of 0.7 μm. Consequently, the proposed p-channel CLC Ge TFTs with single-crystal-like channel fabricated on a longitudinal grain with biaxial tensile strain achieved a superior field-effect mobility of 1014.9 cm2/V-s.

Original languageEnglish
Article number8481375
Pages (from-to)1864-1867
Number of pages4
JournalIEEE Electron Device Letters
Volume39
Issue number12
DOIs
StatePublished - 1 Dec 2018

Keywords

  • Continuous-wave laser crystallization (CLC)
  • polycrystalline germanium (poly-Ge)
  • single-crystal-like
  • thermal strain
  • thin-film transistor (TFT)

Fingerprint Dive into the research topics of 'High-performance germanium thin-film transistors with single-crystal-like channel via continuous-wave laser crystallization'. Together they form a unique fingerprint.

  • Cite this

    Li, Y. S., Wu, C. Y., Liao, C. Y., Huang, W. H., Shieh, J. M., Chou, C. H., Chuang, K. C., Luo, J. D., Li, W. S., & Cheng, H-C. (2018). High-performance germanium thin-film transistors with single-crystal-like channel via continuous-wave laser crystallization. IEEE Electron Device Letters, 39(12), 1864-1867. [8481375]. https://doi.org/10.1109/LED.2018.2873945