High-performance and high-reliability 80-nm gate-length DTMOS with indium super steep retrograde channel

Sun Jay Chang*, Chun Yen Chang, Coming Chen, Tien-Sheng Chao, Yao Jen Lee, Tiao Yuan Huang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

17 Scopus citations

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Chemical Compounds

Engineering & Materials Science