High performance 40-GHz bandpass filters on Si using proton implantation

K. T. Chan; C. Y. Chen; Albert Chin; J. C. Hsieh; J. Liu; T. S. Duh; W. J. Lin

doi:10.1109/DRC.2002.1029517

High performance 40-GHz bandpass filters on Si using proton implantation

K. T. Chan, C. Y. Chen, Albert Chin, J. C. Hsieh, J. Liu, T. S. Duh, W. J. Lin

Department of Electronics Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We report a very simple process to fabricate high performance filters on Si at 40 GHz using H ⁺ implantation. The filter has only -3.4 dB loss at peak transmission of 40 GHz with a broad 9 GHz bandwidth, which are the best filter results on Si at mm-wave frequency. In sharp contrast, the filter on 1.5 μm SiO ₂ isolated Si has much worse transmission and reflection loss and failed for circuit application.

Original language	English
Title of host publication	60th Device Research Conference, DRC 2002
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	69-70
Number of pages	2
ISBN (Electronic)	0780373170
DOIs	https://doi.org/10.1109/DRC.2002.1029517
State	Published - 1 Jan 2002
Event	60th Device Research Conference, DRC 2002 - Santa Barbara, United States Duration: 24 Jun 2002 → 26 Jun 2002

Publication series

Name	Device Research Conference - Conference Digest, DRC
Volume	2002-January
ISSN (Print)	1548-3770

Conference

Conference	60th Device Research Conference, DRC 2002
Country	United States
City	Santa Barbara
Period	24/06/02 → 26/06/02

Keywords

Band pass filters
Bandwidth
Circuits
Conductivity
Gallium arsenide
Performance loss
Propagation losses
Protons
Radio frequency
Reflection

Access to Document

10.1109/DRC.2002.1029517

Link to publication in Scopus

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Chan, K. T., Chen, C. Y., Chin, A., Hsieh, J. C., Liu, J., Duh, T. S., & Lin, W. J. (2002). High performance 40-GHz bandpass filters on Si using proton implantation. In 60th Device Research Conference, DRC 2002 (pp. 69-70). [1029517] (Device Research Conference - Conference Digest, DRC; Vol. 2002-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/DRC.2002.1029517

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title = "High performance 40-GHz bandpass filters on Si using proton implantation",

abstract = " We report a very simple process to fabricate high performance filters on Si at 40 GHz using H + implantation. The filter has only -3.4 dB loss at peak transmission of 40 GHz with a broad 9 GHz bandwidth, which are the best filter results on Si at mm-wave frequency. In sharp contrast, the filter on 1.5 μm SiO 2 isolated Si has much worse transmission and reflection loss and failed for circuit application. ",

keywords = "Band pass filters, Bandwidth, Circuits, Conductivity, Gallium arsenide, Performance loss, Propagation losses, Protons, Radio frequency, Reflection",

author = "Chan, {K. T.} and Chen, {C. Y.} and Albert Chin and Hsieh, {J. C.} and J. Liu and Duh, {T. S.} and Lin, {W. J.}",

year = "2002",

month = jan,

day = "1",

doi = "10.1109/DRC.2002.1029517",

language = "English",

series = "Device Research Conference - Conference Digest, DRC",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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Chan, KT, Chen, CY, Chin, A, Hsieh, JC, Liu, J, Duh, TS & Lin, WJ 2002, High performance 40-GHz bandpass filters on Si using proton implantation. in 60th Device Research Conference, DRC 2002., 1029517, Device Research Conference - Conference Digest, DRC, vol. 2002-January, Institute of Electrical and Electronics Engineers Inc., pp. 69-70, 60th Device Research Conference, DRC 2002, Santa Barbara, United States, 24/06/02. https://doi.org/10.1109/DRC.2002.1029517

High performance 40-GHz bandpass filters on Si using proton implantation. / Chan, K. T.; Chen, C. Y.; Chin, Albert; Hsieh, J. C.; Liu, J.; Duh, T. S.; Lin, W. J.

60th Device Research Conference, DRC 2002. Institute of Electrical and Electronics Engineers Inc., 2002. p. 69-70 1029517 (Device Research Conference - Conference Digest, DRC; Vol. 2002-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Chan, K. T.

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KW - Bandwidth

KW - Circuits

KW - Conductivity

KW - Gallium arsenide

KW - Performance loss

KW - Propagation losses

KW - Protons

KW - Radio frequency

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