High numerical-aperture microlens fabricated by focused ion beam

Yi Chiu*, Chien Hsun Huang, Ying Chien Hsu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations


The focusing objective lens is a key component in the optical pick-up head. In this paper, focused ion beam milling is used to fabricate a NA 0.65 microlens in the silicon nitride film suspended on a silicon substrate. The measured NA is 0.64 and the focused spot size is 0.64 μm.

Original languageEnglish
Title of host publicationOptical Data Storage 2007
StatePublished - 2007
EventOptical Data Storage 2007 - Portland, OR, United States
Duration: 20 May 200723 May 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


ConferenceOptical Data Storage 2007
CountryUnited States
CityPortland, OR


  • Focused ion beam
  • Microlens
  • Numerical aperture
  • Silicon nitride

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