High numerical-aperture microlens fabricated by focused ion beam milling

Yi Chiu, Chien Hsun Huang, Ying Chien Hsu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

A NA 0.65 microlens fabricated by focused ion beam milling in the silicon nitride film on a silicon substrate is presented. The measured NA is 0.64 and the focused spot size is 0.64 μm.

Original languageEnglish
Title of host publicationOptical Data Storage, ODS 2007
PublisherOptical Society of America (OSA)
ISBN (Print)1557528403, 9781557528407
DOIs
StatePublished - 1 Jan 2007
EventOptical Data Storage, ODS 2007 - Portland, OR, United States
Duration: 20 May 200720 May 2007

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

ConferenceOptical Data Storage, ODS 2007
CountryUnited States
CityPortland, OR
Period20/05/0720/05/07

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