High numerical-aperture microlens fabricated by focused ion beam

Yi Chiu; Chien Hsun Huang; Ying Chien Hsu

doi:10.1117/12.738639

High numerical-aperture microlens fabricated by focused ion beam

Yi Chiu^*, Chien Hsun Huang, Ying Chien Hsu

^*Corresponding author for this work

National Chiao Tung University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

4 Scopus citations

Abstract

The focusing objective lens is a key component in the optical pick-up head. In this paper, focused ion beam milling is used to fabricate a NA 0.65 microlens in the silicon nitride film suspended on a silicon substrate. The measured NA is 0.64 and the focused spot size is 0.64 μm.

Original language	English
Title of host publication	Optical Data Storage 2007
DOIs	https://doi.org/10.1117/12.738639
State	Published - 23 Nov 2007
Event	Optical Data Storage 2007 - Portland, OR, United States Duration: 20 May 2007 → 23 May 2007

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6620
ISSN (Print)	0277-786X

Conference

Conference	Optical Data Storage 2007
Country	United States
City	Portland, OR
Period	20/05/07 → 23/05/07

Keywords

Focused ion beam
Microlens
Numerical aperture
Silicon nitride

Access to Document

10.1117/12.738639

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Cite this

@inproceedings{2f6afad8096c4a35840ec747542e11d1,

title = "High numerical-aperture microlens fabricated by focused ion beam",

abstract = "The focusing objective lens is a key component in the optical pick-up head. In this paper, focused ion beam milling is used to fabricate a NA 0.65 microlens in the silicon nitride film suspended on a silicon substrate. The measured NA is 0.64 and the focused spot size is 0.64 μm.",

keywords = "Focused ion beam, Microlens, Numerical aperture, Silicon nitride",

author = "Yi Chiu and Huang, {Chien Hsun} and Hsu, {Ying Chien}",

year = "2007",

month = nov,

day = "23",

doi = "10.1117/12.738639",

language = "English",

isbn = "0819467626",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "Optical Data Storage 2007",

note = "null ; Conference date: 20-05-2007 Through 23-05-2007",

}

TY - GEN

T1 - High numerical-aperture microlens fabricated by focused ion beam

AU - Chiu, Yi

AU - Huang, Chien Hsun

AU - Hsu, Ying Chien

PY - 2007/11/23

Y1 - 2007/11/23

N2 - The focusing objective lens is a key component in the optical pick-up head. In this paper, focused ion beam milling is used to fabricate a NA 0.65 microlens in the silicon nitride film suspended on a silicon substrate. The measured NA is 0.64 and the focused spot size is 0.64 μm.

AB - The focusing objective lens is a key component in the optical pick-up head. In this paper, focused ion beam milling is used to fabricate a NA 0.65 microlens in the silicon nitride film suspended on a silicon substrate. The measured NA is 0.64 and the focused spot size is 0.64 μm.

KW - Focused ion beam

KW - Microlens

KW - Numerical aperture

KW - Silicon nitride

UR - http://www.scopus.com/inward/record.url?scp=36248934707&partnerID=8YFLogxK

U2 - 10.1117/12.738639

DO - 10.1117/12.738639

M3 - Conference contribution

AN - SCOPUS:36248934707

SN - 0819467626

SN - 9780819467621

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Optical Data Storage 2007

Y2 - 20 May 2007 through 23 May 2007

ER -