High-Frequency Time-Dependent Breakdown of SiO2

Elyse Rosenbaum, Chen-Ming Hu

Research output: Contribution to journalArticlepeer-review

29 Scopus citations


Time-dependent dielectric breakdown (TDDB) of thin oxides (8.6-11 nm) is compared under dc, pulse, and bipolar pulse conditions for frequencies up to 4 MHz. Lifetime under unipolar pulse conditions does not deviate largely from that under dc conditions; however, lifetime under bipolar stress conditions increases by a factor of 40 to 100 at frequencies above 10 kHz. The field acceleration of breakdown time is similar for dc and pulse stressing.

Original languageEnglish
Pages (from-to)267-269
Number of pages3
JournalIEEE Electron Device Letters
Issue number6
StatePublished - 1 Jan 1991

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