High density RF MIM capacitors using high-κ AlTaOx dielectrics

C. H. Huang*, M. Y. Yang, Albert Chin, Chunxiang Zhu, M. F. Li, Dim Lee Kwong

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

25 Scopus citations

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Physics & Astronomy

Engineering & Materials Science