Carbon-based emitter arrays with well-separated cells of μm scale were fabricated and their field emission properties were characterized. Carbon nanotubes grew on top of the metal layer in the array but not on the plain Si substrate. The fabrication process of patterned template is well established and is applicable for large area process. The synthetic approach proposed is well within the capabilities of the IC industry for automation and scale up production of practical devices.
|Number of pages||5|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|State||Published - 1 May 2000|