High current density field emission from arrays of carbon nanotubes and diamond-clad Si tips

F. G. Tarntair*, L. C. Chen, S. L. Wei, W. K. Hong, K. H. Chen, Huang-Chung Cheng

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

49 Scopus citations

Abstract

Carbon-based emitter arrays with well-separated cells of μm scale were fabricated and their field emission properties were characterized. Carbon nanotubes grew on top of the metal layer in the array but not on the plain Si substrate. The fabrication process of patterned template is well established and is applicable for large area process. The synthetic approach proposed is well within the capabilities of the IC industry for automation and scale up production of practical devices.

Original languageEnglish
Pages (from-to)1207-1211
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume18
Issue number3
DOIs
StatePublished - 1 May 2000

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