Abstract
This study proposes a novel HfO2 nanocrystal memory on epi-SiGe (Ge: 15%) channel. Because SiGe has a smaller bandgap than that of silicon, it increases electron/hole injection and the enhances program/erase speeds. This study compares the characteristics of HfO2 nanocrystal memories with different oxynitride tunnel oxide thicknesses on Si and epi-SiGe substrate. Results show that the proposed nonvolatile memory possesses superior characteristics in terms of considerably large memory window for two-bits operation, high speed program/erase for low power applications, long retention time, excellent endurance, and strong immunity to disturbance.
Original language | English |
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Pages (from-to) | 5-9 |
Number of pages | 5 |
Journal | Solid-State Electronics |
Volume | 80 |
DOIs | |
State | Published - 1 Jan 2013 |
Keywords
- Flash memory
- Hafnium oxide
- Nanocrystals
- Nonvolatile memories
- SiGe channel