Helium implanted silicon waveguide photodetectors for optical power monitors

Y. Liu*, Chi Wai Chow, W. Y. Cheung, H. K. Tsang

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The enhanced photo-response of helium ion implanted silicon waveguides as a function of different anneal temperatures and durations is reported. The enhancement in responsivity at communication wavelength was sufficient for use as optical power monitors.

Original languageEnglish
Title of host publicationProceedings - Thirteenth International Symposium on Temporal Representation and Reasoning, TIME 2006
DOIs
StatePublished - 14 Dec 2006
Event2006 Optical Fiber Communication Conference, and the 2006 National Fiber Optic Engineers Conference - Anaheim, CA, United States
Duration: 5 Mar 200610 Mar 2006

Publication series

Name2006 Optical Fiber Communication Conference, and the 2006 National Fiber Optic Engineers Conference
Volume2006

Conference

Conference2006 Optical Fiber Communication Conference, and the 2006 National Fiber Optic Engineers Conference
CountryUnited States
CityAnaheim, CA
Period5/03/0610/03/06

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  • Cite this

    Liu, Y., Chow, C. W., Cheung, W. Y., & Tsang, H. K. (2006). Helium implanted silicon waveguide photodetectors for optical power monitors. In Proceedings - Thirteenth International Symposium on Temporal Representation and Reasoning, TIME 2006 [1636593] (2006 Optical Fiber Communication Conference, and the 2006 National Fiber Optic Engineers Conference; Vol. 2006). https://doi.org/10.1109/OFC.2006.215562