Growth parameter effect in superconducting YBa2Cu4O8 thin films by d.c. magnetron sputtering

S. C. Wu; H. T. Hsu; F. H. Chen; W. R. Chang; Tseung-Yuen Tseng

doi:10.1007/BF00349952

Growth parameter effect in superconducting YBa₂Cu₄O₈ thin films by d.c. magnetron sputtering

S. C. Wu^*, H. T. Hsu, F. H. Chen, W. R. Chang, Tseung-Yuen Tseng

^*Corresponding author for this work

Department of Electronics Engineering

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

High- T_c YBa₂Cu₄O₈ (124) thin films have been made by d.c. magnetron sputtering deposition on (100) MgO substrates. The effect of several processing variables, including the ratio of oxygen to argon, total pressure, and substrate temperature, on the superconducting properties of the thin films, were systematically investigated. The as-prepared films annealed in flowing oxygen at 800°C for 4 h under ambient pressure obtained nearly phase-pure 124 and exhibited superconducting onset transition at 75 K.

Original language	English
Pages (from-to)	5593-5598
Number of pages	6
Journal	Journal of Materials Science
Volume	29
Issue number	21
DOIs	https://doi.org/10.1007/BF00349952
State	Published - Nov 1994

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@article{ac0ad8227cb7463c915570c7d4768490,

title = "Growth parameter effect in superconducting YBa2Cu4O8 thin films by d.c. magnetron sputtering",

abstract = "High- Tc YBa2Cu4O8 (124) thin films have been made by d.c. magnetron sputtering deposition on (100) MgO substrates. The effect of several processing variables, including the ratio of oxygen to argon, total pressure, and substrate temperature, on the superconducting properties of the thin films, were systematically investigated. The as-prepared films annealed in flowing oxygen at 800°C for 4 h under ambient pressure obtained nearly phase-pure 124 and exhibited superconducting onset transition at 75 K.",

author = "Wu, {S. C.} and Hsu, {H. T.} and Chen, {F. H.} and Chang, {W. R.} and Tseung-Yuen Tseng",

year = "1994",

month = nov,

doi = "10.1007/BF00349952",

language = "English",

volume = "29",

pages = "5593--5598",

journal = "Journal of Materials Science",

issn = "0022-2461",

publisher = "Springer Netherlands",

number = "21",

}

TY - JOUR

T1 - Growth parameter effect in superconducting YBa2Cu4O8 thin films by d.c. magnetron sputtering

AU - Wu, S. C.

AU - Hsu, H. T.

AU - Chen, F. H.

AU - Chang, W. R.

AU - Tseng, Tseung-Yuen

PY - 1994/11

Y1 - 1994/11

N2 - High- Tc YBa2Cu4O8 (124) thin films have been made by d.c. magnetron sputtering deposition on (100) MgO substrates. The effect of several processing variables, including the ratio of oxygen to argon, total pressure, and substrate temperature, on the superconducting properties of the thin films, were systematically investigated. The as-prepared films annealed in flowing oxygen at 800°C for 4 h under ambient pressure obtained nearly phase-pure 124 and exhibited superconducting onset transition at 75 K.

AB - High- Tc YBa2Cu4O8 (124) thin films have been made by d.c. magnetron sputtering deposition on (100) MgO substrates. The effect of several processing variables, including the ratio of oxygen to argon, total pressure, and substrate temperature, on the superconducting properties of the thin films, were systematically investigated. The as-prepared films annealed in flowing oxygen at 800°C for 4 h under ambient pressure obtained nearly phase-pure 124 and exhibited superconducting onset transition at 75 K.

UR - http://www.scopus.com/inward/record.url?scp=0028543124&partnerID=8YFLogxK

U2 - 10.1007/BF00349952

DO - 10.1007/BF00349952

M3 - Article

AN - SCOPUS:0028543124

VL - 29

SP - 5593

EP - 5598

JO - Journal of Materials Science

JF - Journal of Materials Science

SN - 0022-2461

IS - 21

ER -

Growth parameter effect in superconducting YBa₂Cu₄O₈ thin films by d.c. magnetron sputtering

Abstract

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