Growth parameter effect in superconducting YBa2Cu4O8 thin films by d.c. magnetron sputtering

S. C. Wu*, H. T. Hsu, F. H. Chen, W. R. Chang, Tseung-Yuen Tseng

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

4 Scopus citations


High- Tc YBa2Cu4O8 (124) thin films have been made by d.c. magnetron sputtering deposition on (100) MgO substrates. The effect of several processing variables, including the ratio of oxygen to argon, total pressure, and substrate temperature, on the superconducting properties of the thin films, were systematically investigated. The as-prepared films annealed in flowing oxygen at 800°C for 4 h under ambient pressure obtained nearly phase-pure 124 and exhibited superconducting onset transition at 75 K.

Original languageEnglish
Pages (from-to)5593-5598
Number of pages6
JournalJournal of Materials Science
Issue number21
StatePublished - Nov 1994

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