Growth of carbon nanotube field emitters in the triode structure using anodic aluminum oxide as the template

Chen Chun Lin; Kai Chun Chang; Fu-Ming Pan; Cheng Tzu Kuo; Mai Liu; Chi Neng Mo

doi:10.1016/j.diamond.2007.01.034

Growth of carbon nanotube field emitters in the triode structure using anodic aluminum oxide as the template

Chen Chun Lin, Kai Chun Chang, Fu-Ming Pan^*, Cheng Tzu Kuo, Mai Liu, Chi Neng Mo

^*Corresponding author for this work

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

13 Scopus citations

Abstract

Carbon nanotubes (CNT) were grown in anodic aluminum oxide (AAO) and used as field emitters in a triode structure. To fabricate the field-emission triode structure, nanoporous anodic aluminum oxide (AAO) thin layer was first prepared on the Si(100) substrate, followed by the growth of vertically aligned carbon nanotubes in AAO pore channels by electron cyclotron resonance chemical vapor deposition (ECR-CVD). The SiO₂ dielectric and Al gate electrode layers required for the triode structure were directly deposited on the CNTs. Reactive ion and wet etches were then used to open the field-emission area in the triode. Scanning electron microscopy and Raman spectroscopy studies revealed that damage to CNT emitters in the etched area was trivial. Field-emission characteristics of the CNT emitters have been studied and an anode turn-on electric field of ∼ 8.05 V/μm was measured.

Original language	English
Pages (from-to)	1388-1392
Number of pages	5
Journal	Diamond and Related Materials
Volume	16
Issue number	4-7 SPEC. ISS.
DOIs	https://doi.org/10.1016/j.diamond.2007.01.034
State	Published - 1 Apr 2007

Keywords

Anodic aluminum oxide (AAO)
Carbon nanotubes (CNT)
Field-emission

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title = "Growth of carbon nanotube field emitters in the triode structure using anodic aluminum oxide as the template",

abstract = "Carbon nanotubes (CNT) were grown in anodic aluminum oxide (AAO) and used as field emitters in a triode structure. To fabricate the field-emission triode structure, nanoporous anodic aluminum oxide (AAO) thin layer was first prepared on the Si(100) substrate, followed by the growth of vertically aligned carbon nanotubes in AAO pore channels by electron cyclotron resonance chemical vapor deposition (ECR-CVD). The SiO2 dielectric and Al gate electrode layers required for the triode structure were directly deposited on the CNTs. Reactive ion and wet etches were then used to open the field-emission area in the triode. Scanning electron microscopy and Raman spectroscopy studies revealed that damage to CNT emitters in the etched area was trivial. Field-emission characteristics of the CNT emitters have been studied and an anode turn-on electric field of ∼ 8.05 V/μm was measured.",

keywords = "Anodic aluminum oxide (AAO), Carbon nanotubes (CNT), Field-emission",

author = "Lin, {Chen Chun} and Chang, {Kai Chun} and Fu-Ming Pan and Kuo, {Cheng Tzu} and Mai Liu and Mo, {Chi Neng}",

year = "2007",

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language = "English",

volume = "16",

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T1 - Growth of carbon nanotube field emitters in the triode structure using anodic aluminum oxide as the template

AU - Lin, Chen Chun

AU - Chang, Kai Chun

AU - Pan, Fu-Ming

AU - Kuo, Cheng Tzu

AU - Liu, Mai

AU - Mo, Chi Neng

PY - 2007/4/1

Y1 - 2007/4/1

N2 - Carbon nanotubes (CNT) were grown in anodic aluminum oxide (AAO) and used as field emitters in a triode structure. To fabricate the field-emission triode structure, nanoporous anodic aluminum oxide (AAO) thin layer was first prepared on the Si(100) substrate, followed by the growth of vertically aligned carbon nanotubes in AAO pore channels by electron cyclotron resonance chemical vapor deposition (ECR-CVD). The SiO2 dielectric and Al gate electrode layers required for the triode structure were directly deposited on the CNTs. Reactive ion and wet etches were then used to open the field-emission area in the triode. Scanning electron microscopy and Raman spectroscopy studies revealed that damage to CNT emitters in the etched area was trivial. Field-emission characteristics of the CNT emitters have been studied and an anode turn-on electric field of ∼ 8.05 V/μm was measured.

AB - Carbon nanotubes (CNT) were grown in anodic aluminum oxide (AAO) and used as field emitters in a triode structure. To fabricate the field-emission triode structure, nanoporous anodic aluminum oxide (AAO) thin layer was first prepared on the Si(100) substrate, followed by the growth of vertically aligned carbon nanotubes in AAO pore channels by electron cyclotron resonance chemical vapor deposition (ECR-CVD). The SiO2 dielectric and Al gate electrode layers required for the triode structure were directly deposited on the CNTs. Reactive ion and wet etches were then used to open the field-emission area in the triode. Scanning electron microscopy and Raman spectroscopy studies revealed that damage to CNT emitters in the etched area was trivial. Field-emission characteristics of the CNT emitters have been studied and an anode turn-on electric field of ∼ 8.05 V/μm was measured.

KW - Anodic aluminum oxide (AAO)

KW - Carbon nanotubes (CNT)

KW - Field-emission

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U2 - 10.1016/j.diamond.2007.01.034

DO - 10.1016/j.diamond.2007.01.034

M3 - Article

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VL - 16

SP - 1388

EP - 1392

JO - Diamond and Related Materials

JF - Diamond and Related Materials

SN - 0925-9635

IS - 4-7 SPEC. ISS.

ER -

Growth of carbon nanotube field emitters in the triode structure using anodic aluminum oxide as the template

Abstract

Keywords

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