Growth and characterization of chemical-vapor-deposited zinc oxide nanorods

Chia Ling Wu, Li Chang*, Hou Guang Chen, Chih Wei Lin, Te Fu Chang, Yen Cheng Chao, Jhih Kun Yan

*Corresponding author for this work

Research output: Contribution to journalConference article

55 Scopus citations


ZnO nanorods were grown on Si substrates by metal-organic chemical vapor deposition (CVD). The ZnO nanorods were characterized by scanning electron microscopy, transmission electron microscopy (TEM), and X-ray diffraction. It was found that highly oriented ZnO single-crystalline nanorods were formed only on the substrate coated with a gold film. Without the gold, ZnO was deposited as a continuous film. No Au was observed on top of the ZnO nanorods, implying that the Au plays no role as catalytic metal in vapor-liquid-solid mechanism for formation of ZnO nanorods. In CVD, oriented ZnO nanorods along the c-axis were grown as a result of 〈111〉 textured Au. High-resolution TEM shows that the gold layer and ZnO are in orientation relationship of Au {111} planes//ZnO (0002) basal planes.

Original languageEnglish
Pages (from-to)137-141
Number of pages5
JournalThin Solid Films
Issue number1-2
StatePublished - 1 Mar 2006
EventProceedings of the Third Asian Conference on Chemical Vapor Deposition (Third Asian-CVD), Third Asian CVD -
Duration: 12 Nov 200414 Nov 2004


  • Chemical vapor deposition
  • Gold
  • Nanorod
  • Zinc oxide

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    Wu, C. L., Chang, L., Chen, H. G., Lin, C. W., Chang, T. F., Chao, Y. C., & Yan, J. K. (2006). Growth and characterization of chemical-vapor-deposited zinc oxide nanorods. Thin Solid Films, 498(1-2), 137-141.