Gravity-assisted seeding control for 1-D material growth

C. C. Chen, Lun Hao Hsu, Kai Rern, Yu-Ting Cheng, Yi Fan Hsieh, Pu-Wei Wu

Research output: Contribution to journalArticle

Abstract

This letter presents a seeding control scheme by utilizing gravity force to form an agglomeration of molten Co seeds on a patterned inverted silicon nanopyramid. Nanometer sized molten Co seeds formed on a nonwettable inverted pyramid surface can roll along the inclination followed by aggregation to form a singular seed with the size depending on the pyramid size and the thickness of as-deposited Co film inside the pyramid. The proposed scheme allowing the formation of well-aligned catalytic seeds with manipulated size will promise the control growth of 1-D material for practical integrated microelectronic device fabrication.

Original languageEnglish
Article number4982691
Pages (from-to)427-430
Number of pages4
JournalIEEE Transactions on Nanotechnology
Volume8
Issue number4
DOIs
StatePublished - 1 Jul 2009

Keywords

  • 1-D material
  • 3D-IC
  • Gravity-assisted
  • Integrated nanoelectronic circuit
  • Seeding control

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