Gaas mmic chip-sets for mobile communication systems with on-chip ferroelectric capacitors

Tetsuzo Ueda, Atsushi Noma, Daisuke Ueda

Research output: Contribution to journalArticle

27 Scopus citations

Abstract

GaAs microwave monolithic integrated circuits (MMICs) with Ba1-xSrxTiO3 (BST) capacitors have been developed. Spin-coating of sol-gel solution was used to make the BST thin film. The obtained BST film has a dielectric constant of 300 that is 50 times higher than the conventional SiN one. The capacitance has the frequency roll-off over 2 GHz, which is sufficient enough for a variety of consumer applications. The implemented GaAs MMICs with on-chip BST capacitors enable the positive-bias supply and high gain performance as well as the small package outline.

Original languageEnglish
Pages (from-to)45-60
Number of pages16
JournalIntegrated Ferroelectrics
Volume7
Issue number1-4
DOIs
StatePublished - 1 Jan 1995

Fingerprint Dive into the research topics of 'Gaas mmic chip-sets for mobile communication systems with on-chip ferroelectric capacitors'. Together they form a unique fingerprint.

  • Cite this