Future semiconductor manufacturing - Challenges and opportunities

Hiroshi Iwai*

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

20 Scopus citations

Abstract

Recently, CMOS scaling has been accelerated very aggressively in both production and research levels. Already, sub-100 nm gate length CMOS LSIs are used for many applications in a huge volume and even transistor operation of 5 nm gate length CMOS was reported in a conference. However, many serious problems are expected for implementing smaller-geometry MOSFETs into large-scale integrated circuits even at the 45 nm (HP65nm) technology node. The skyrocketing increase of production costs is a serious concern and many people feel some kind of drastic evolution or even a revolution is required in order to continue several more generations towards 10 nm. In this paper, future semiconductor manufacturing challenges are described including the possible limits of scaling.

Original languageEnglish
Pages (from-to)11-16
Number of pages6
JournalTechnical Digest - International Electron Devices Meeting, IEDM
StatePublished - 2004
EventIEEE International Electron Devices Meeting, 2004 IEDM - San Francisco, CA, United States
Duration: 13 Dec 200415 Dec 2004

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