Progress of ICT (Information and Communication Technology) made our society 'smart' and convenient. Already, internet, SNS, smart phones, IoT, and big data analysis are available. In near future full-automatic automobile drive will become possible, and even some people expected that the artificial intelligence will exceed the human brain ability 30 years from now. In anyhow our society will be revolutionarily changed within a few decades by ICT progress. The progress of the ICT has been driven by the development of integrated technologies. It was 1971 when the first microprocessor by Intel realized the ICT with small-size and low power consumption. The performance of the microprocessor at that time was, however, only a millionth of today's one. In order to improve the performance, huge efforts have been made to miniaturize the MOSFETs. Indeed, the miniaturization has been conducted for 19 generations from 10 μm to 14 nm technologies, according to the guide line of Moore's law and the scaling theory. However, the former is just a prediction of the growth rate of the numbers of the components or MOSFETs in a chip, and the latter is a principle of the downscaling scheme of the MOSFETs. They are not to guarantee the actual miniaturization nor to show concrete solutions to make the miniaturization successful. Thus, innovations, such as novel ideas, the improvement of the structures, or the introduction of new process techniques and new materials have been requited for every miniaturized generations.