Fundamental study on reducing on-resistance by introducing strain into silicon vertical power devices

Takeya Inoue, Takuya Hoshii, Takuo Kikuchi, Hidehiko Yabuhara, Kazuyuki Ito, Kuniyuki Kakushima, Hitoshi Wakabayashi, Hiroshi Iwai, Junichi Tonotani, Kazuo Tsutsui

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

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Chemical Compounds

Physics & Astronomy

Engineering & Materials Science