FPGA-based motion controller for wafer-handling robot

Hsin Hung Chou, Ying Shieh Kung, Tai Wei Tsui, Stone Cheng

Research output: Contribution to journalArticlepeer-review

2 Scopus citations


This study applies FPGA (Field Programmable Gate Arrays) technology to implement a motion controller for wafer-handling robot which has three-DOF (Degree of Freedom) motion. The proposed FPGA-based motion controller has two modules. The first module is Nios II processor which is used to realize the motion trajectory computation and the three-axis position/speed controllers. The second module is demonstrated to implement the three-axis current vector controllers by using FPGA hardware, and VHDL (VHSIC Hardware Description Language) is adopted to describe the controller behavior. Therefore, a fully digital motion controller for wafer-handling robot, such as one trajectory planning, three current vector controllers and three position/speed controllers are all implemented with an FPGA chip.

Original languageEnglish
Pages (from-to)427-437
Number of pages11
JournalTransactions of the Canadian Society for Mechanical Engineering
Issue number3
StatePublished - 1 Dec 2013


  • Field programmable gate arrays (FPGA)
  • Motion controller
  • Wafer-handling robot

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