Foundry technology trend

Jack Y.C. Sun*

*Corresponding author for this work

Research output: Contribution to journalConference article

4 Scopus citations

Abstract

This paper gives an overview of the foundry model and foundry technology trend in the future. The foundry model is a part of the natural trend toward the vertical dis-integration (or horizontal specialization) of the semiconductor industry. Foundry technology is already in the leading pack, and will be on the leading edge from now on. Foundry technology will be market driven toward low voltage (core), low power, high performance, high density, and system on chip (SOC). Examples of leading-edge 0.25um logic and 0.18um and beyond process features will be used to illustrate this trend.

Original languageEnglish
Pages (from-to)19-24
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3509
DOIs
StatePublished - 1998
EventIn-Line Characterization Techniques fot Performance and Yield Enhancement in Microelectronic Manufacturing II - Santa Clara, CA, United States
Duration: 23 Sep 199824 Sep 1998

Keywords

  • CMOS
  • Disintegration
  • Embedded memory
  • Foundry
  • Horizontal specialization
  • Interconnect
  • Logic
  • Low power
  • Scaling
  • System on chip
  • ULSI

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