Foundry technology has emerged from OEM to standard generic process in the past 10 years, and now to the leading edge for the next decade. This paper gives an overview of the present and future foundry technologies which are the foundation of the virtual fab for fabless, integrated device manufacturer (IDM), and system companies.
|Number of pages||4|
|Journal||Technical Digest - International Electron Devices Meeting|
|State||Published - 1998|
|Event||Proceedings of the 1998 IEEE International Electron Devices Meeting - San Francisco, CA, USA|
Duration: 6 Dec 1998 → 9 Dec 1998