Foundry technology for the next decade

Jack Y.C. Sun*, Shang Yi Chiang, Mark Liu

*Corresponding author for this work

Research output: Contribution to journalConference article

9 Scopus citations

Abstract

Foundry technology has emerged from OEM to standard generic process in the past 10 years, and now to the leading edge for the next decade. This paper gives an overview of the present and future foundry technologies which are the foundation of the virtual fab for fabless, integrated device manufacturer (IDM), and system companies.

Original languageEnglish
Pages (from-to)321-324
Number of pages4
JournalTechnical Digest - International Electron Devices Meeting
DOIs
StatePublished - 1998
EventProceedings of the 1998 IEEE International Electron Devices Meeting - San Francisco, CA, USA
Duration: 6 Dec 19989 Dec 1998

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