Formation of TiSi2 on nitrogen ion implanted (001)Si

S. L. Cheng*, L. J. Chen, Bing-Yue Tsui

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Fingerprint Dive into the research topics of 'Formation of TiSi<sub>2</sub> on nitrogen ion implanted (001)Si'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy