Fluorinated polyimides for interlayer dielectric applications: Tailoring of properties via copolymerization

Brian C. Auman*, Andrew J. McKerrow, Jih-Perng Leu, Paul S. Ho

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Scopus citations
Original languageEnglish
Pages (from-to)142-143
Number of pages2
JournalAmerican Chemical Society, Polymer Preprints, Division of Polymer Chemistry
Volume37
Issue number1
StatePublished - 1 Mar 1996

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