Flip-up micro scanning mirror with vertical comb drive assembled by simple push operations

Cheng An Chen*, Yi Chiu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

A novel flip-up micro scanning mirror is fabricated in SOI substrates with SU8 vertical comb drive actuators. The device is assembled by simple push operation. The design and fabrication of the device is presented.

Original languageEnglish
Title of host publicationProceedings - OMN2011
Subtitle of host publication16th International Conference on Optical MEMS and Nanophotonics
Pages189-190
Number of pages2
DOIs
StatePublished - 12 Dec 2011
Event16th International Conference on Optical MEMS and Nanophotonics, OMN2011 - Istanbul, Turkey
Duration: 8 Aug 201111 Aug 2011

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Conference

Conference16th International Conference on Optical MEMS and Nanophotonics, OMN2011
CountryTurkey
CityIstanbul
Period8/08/1111/08/11

Keywords

  • assembly
  • flip-up
  • scanning mirror
  • vertical comb drive

Fingerprint Dive into the research topics of 'Flip-up micro scanning mirror with vertical comb drive assembled by simple push operations'. Together they form a unique fingerprint.

Cite this