Flexible electret energy harvester with copper mesh electrodes

Yi Chiu, Ming Hsuan Lee, Wei Hung Hsu

Research output: Contribution to journalConference articlepeer-review

4 Scopus citations


Flexible energy harvesters are desired in biomedical applications since human motion is often complicated and aperiodic. However, most demonstrated flexible energy harvesters employ piezoelectric materials which are not biocompatible. Therefore we propose a PDMS-based flexible energy harvester with Parylene-C electret suitable for biomedical applications. To address the reliability issues of sputtered metal electrodes, we use copper mesh electrodes to improve the reliability. The proposed flexible harvester was fabricated and characterized. The measured power of the proposed harvester was 3.33 pW in the compression tests at 20 Hz and 8.5 nW in the finger bending tests at 2 Hz.

Original languageEnglish
Article number012072
JournalJournal of Physics: Conference Series
Issue number1
StatePublished - 1 Jan 2014
Event14th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications, PowerMEMS 2014 - Awaji Island, Hyogo, Japan
Duration: 18 Nov 201421 Nov 2014

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