Perovskite type lead magnesium niobate Pb(Mg1/3Nb2/3)O3 (PMN) films with BaTiO3 (BT) buffer layers on Pt/Ti/SiO2/Si substrates were prepared by pulsed laser deposition (PLD). Effects of PMN thicknesses on the film structural and dielectric properties were investigated mainly by the high-resolution X-ray diffraction. The grazing X-ray diffraction with various incident angles was used for the analysis of film-depth effects upon the lattice constant and orientation. The thickness dependencies of lattice constant, orientation and dielectric constant of PMN are caused by the thermal residual stress due to the large difference in thermal expansion coefficient between the PMN and bottom layers.
|Number of pages||5|
|Journal||Key Engineering Materials|
|State||Published - 2 Dec 2002|
|Event||Asian Ceramic Science for Electronics II Proceedings of the 2nd Asian Meeting of Electroceramics - Kawasaki, Japan|
Duration: 1 Oct 2001 → 1 Oct 2001
- Grazing X-Ray Diffraction
- Thermal Expansion