Femtosecond laser processing of indium-tin-oxide thin films

Chung-Wei Cheng; I. M. Lee; J. S. Chen

doi:10.1016/j.optlaseng.2015.01.011

Femtosecond laser processing of indium-tin-oxide thin films

Chung-Wei Cheng^*, I. M. Lee, J. S. Chen

^*Corresponding author for this work

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

Abstract

Micro- and nano-scale crystalline indium-tin-oxide (c-ITO) patterns fabricated from amorphous ITO (a-ITO) thin films on a glass substrate using a (low NA 0.26) femtosecond laser pulse that is not tightly focused are demonstrated. Different types of c-ITO patterns are obtained by controlling the laser pulse energies and pulse repetition rate of a femtosecond laser beam at a wavelength of 1064 nm: periodic micro c-ITO dots with diameters of ~1.4 μm, two parallel c-ITO patterns with/without periodic-like glass nanostructures at a laser scanning path and nano-scale c-ITO line patterns with a line width ~900 nm, i.e. ~1/8 of the focused beam's diameter (7 μm at 1/e ² ).

Original language	English
Pages (from-to)	1-6
Number of pages	6
Journal	Optics and Lasers in Engineering
Volume	69
DOIs	https://doi.org/10.1016/j.optlaseng.2015.01.011
State	Published - 1 Jan 2015

Keywords

Crystallization
Femtosecond laser
Indium-tin-oxide
Nano-scale

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title = "Femtosecond laser processing of indium-tin-oxide thin films",

abstract = " Micro- and nano-scale crystalline indium-tin-oxide (c-ITO) patterns fabricated from amorphous ITO (a-ITO) thin films on a glass substrate using a (low NA 0.26) femtosecond laser pulse that is not tightly focused are demonstrated. Different types of c-ITO patterns are obtained by controlling the laser pulse energies and pulse repetition rate of a femtosecond laser beam at a wavelength of 1064 nm: periodic micro c-ITO dots with diameters of ~1.4 μm, two parallel c-ITO patterns with/without periodic-like glass nanostructures at a laser scanning path and nano-scale c-ITO line patterns with a line width ~900 nm, i.e. ~1/8 of the focused beam's diameter (7 μm at 1/e 2 ). ",

keywords = "Crystallization, Femtosecond laser, Indium-tin-oxide, Nano-scale",

author = "Chung-Wei Cheng and Lee, {I. M.} and Chen, {J. S.}",

year = "2015",

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doi = "10.1016/j.optlaseng.2015.01.011",

language = "English",

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journal = "Optics and Lasers in Engineering",

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T1 - Femtosecond laser processing of indium-tin-oxide thin films

AU - Cheng, Chung-Wei

AU - Lee, I. M.

AU - Chen, J. S.

PY - 2015/1/1

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N2 - Micro- and nano-scale crystalline indium-tin-oxide (c-ITO) patterns fabricated from amorphous ITO (a-ITO) thin films on a glass substrate using a (low NA 0.26) femtosecond laser pulse that is not tightly focused are demonstrated. Different types of c-ITO patterns are obtained by controlling the laser pulse energies and pulse repetition rate of a femtosecond laser beam at a wavelength of 1064 nm: periodic micro c-ITO dots with diameters of ~1.4 μm, two parallel c-ITO patterns with/without periodic-like glass nanostructures at a laser scanning path and nano-scale c-ITO line patterns with a line width ~900 nm, i.e. ~1/8 of the focused beam's diameter (7 μm at 1/e 2 ).

AB - Micro- and nano-scale crystalline indium-tin-oxide (c-ITO) patterns fabricated from amorphous ITO (a-ITO) thin films on a glass substrate using a (low NA 0.26) femtosecond laser pulse that is not tightly focused are demonstrated. Different types of c-ITO patterns are obtained by controlling the laser pulse energies and pulse repetition rate of a femtosecond laser beam at a wavelength of 1064 nm: periodic micro c-ITO dots with diameters of ~1.4 μm, two parallel c-ITO patterns with/without periodic-like glass nanostructures at a laser scanning path and nano-scale c-ITO line patterns with a line width ~900 nm, i.e. ~1/8 of the focused beam's diameter (7 μm at 1/e 2 ).

KW - Crystallization

KW - Femtosecond laser

KW - Indium-tin-oxide

KW - Nano-scale

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