Abstract
Micro- and nano-scale crystalline indium-tin-oxide (c-ITO) patterns fabricated from amorphous ITO (a-ITO) thin films on a glass substrate using a (low NA 0.26) femtosecond laser pulse that is not tightly focused are demonstrated. Different types of c-ITO patterns are obtained by controlling the laser pulse energies and pulse repetition rate of a femtosecond laser beam at a wavelength of 1064 nm: periodic micro c-ITO dots with diameters of ~1.4 μm, two parallel c-ITO patterns with/without periodic-like glass nanostructures at a laser scanning path and nano-scale c-ITO line patterns with a line width ~900 nm, i.e. ~1/8 of the focused beam's diameter (7 μm at 1/e 2 ).
Original language | English |
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Pages (from-to) | 1-6 |
Number of pages | 6 |
Journal | Optics and Lasers in Engineering |
Volume | 69 |
DOIs | |
State | Published - 1 Jan 2015 |
Keywords
- Crystallization
- Femtosecond laser
- Indium-tin-oxide
- Nano-scale