Femtosecond laser processing of indium-tin-oxide thin films

Chung-Wei Cheng*, I. M. Lee, J. S. Chen

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

7 Scopus citations


Micro- and nano-scale crystalline indium-tin-oxide (c-ITO) patterns fabricated from amorphous ITO (a-ITO) thin films on a glass substrate using a (low NA 0.26) femtosecond laser pulse that is not tightly focused are demonstrated. Different types of c-ITO patterns are obtained by controlling the laser pulse energies and pulse repetition rate of a femtosecond laser beam at a wavelength of 1064 nm: periodic micro c-ITO dots with diameters of ~1.4 μm, two parallel c-ITO patterns with/without periodic-like glass nanostructures at a laser scanning path and nano-scale c-ITO line patterns with a line width ~900 nm, i.e. ~1/8 of the focused beam's diameter (7 μm at 1/e 2 ).

Original languageEnglish
Pages (from-to)1-6
Number of pages6
JournalOptics and Lasers in Engineering
StatePublished - 1 Jan 2015


  • Crystallization
  • Femtosecond laser
  • Indium-tin-oxide
  • Nano-scale

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