Femtosecond laser-induced nanoperiodic structures and simultaneous crystallization in amorphous indium-tin-oxide thin films

Chung-Wei Cheng*, I. M. Lee, J. S. Chen

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

12 Scopus citations

Abstract

Fabrication of crystalline indium-tin-oxide (c-ITO) nanogratings and smooth line patterns on amorphous ITO (a-ITO) thin films by femtosecond laser-induced structuring and simultaneous crystallization followed by chemical etching is demonstrated. Three types of c-ITO structures are obtained merely by controlling the laser pulse energy of a high-repetition rate femtosecond laser at wavelength 532 nm: nanogratings perpendicular to laser polarization direction with period of 130±11nm, smooth c-ITO line patterns as well as nanogratings parallel to laser polarization direction with period of 390 ± 10nm. Large area c-ITO patterns and nanograting structures are fabricated, which are expected to be used in optoelectronic and micro-electronic devices.

Original languageEnglish
Pages (from-to)9-14
Number of pages6
JournalApplied Surface Science
Volume316
Issue number1
DOIs
StatePublished - 1 Jan 2014

Keywords

  • Crystallization
  • Femtosecond laser
  • Indium-tin-oxide
  • Nanoperiodic structure

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