Femtosecond laser induced micro/nano structures on metals

Chung-Wei Cheng, Yi Hsien Liu, Jinn Kuen Chen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


In this study, novel annular microstructures on metal surfaces were fabricated with a femtosecond laser beam propagating through a microhole and irradiating on the surface of stainless steel SUS 304. The results showed that, with the use of a linearly polarized femtosecond laser beam (800 nm, 120 fs) irradiating through a microhole of diameter 80∼100 μm and depth 800 μm, annular microstructures with a period of 4∼8 μm were formed. Differing from the laser induced periodic surface structure (LIPSS), the formed annular microstructures are independent of laser polarization. This study speculates that this formation mechanism is due to the interference between the incident laser beam and the reflected beams from the microhole walls.

Original languageEnglish
Title of host publicationLaser-Based Micro- and Nanoprocessing XIV
EditorsUdo Klotzbach, Akira Watanabe, Rainer Kling
ISBN (Electronic)9781510632998
StatePublished - 1 Jan 2020
EventLaser-Based Micro- and Nanoprocessing XIV 2020 - San Francisco, United States
Duration: 3 Feb 20206 Feb 2020

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceLaser-Based Micro- and Nanoprocessing XIV 2020
CountryUnited States
CitySan Francisco


  • Femtosecond laser
  • Laser-induced periodic surface structure

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