Femtosecond laser drilling of copper: Modeling and experiment comparison

Yi Hsien Liu, Chung Wei Cheng, Jinn Kuen Chen

Research output: Contribution to journalArticle

Abstract

This study experimentally and theoretically investigated the ablation of copper by a femtosecond green laser pulse of wavelength 515 nm and pulse duration 300 fs. The copper was processed by a single laser pulse with fluences up to 789 J/cm2. A modified Drude-critical point (DCP) model that considers the temperature-dependent inter-band transition, a two-temperature model (TTM), two phase change models, and a phase explosion model were adopted to obtain the temperature-dependent properties and ablation depth. The simulated ablation depths by the proposed DCP-mod method were in better agreement with the experimental results than those by the conventional DCP model.

Original languageEnglish
Pages (from-to)25-30
Number of pages6
JournalJournal of Laser Micro Nanoengineering
Volume15
Issue number1
DOIs
StatePublished - 1 Jun 2020

Keywords

  • Drude-critical point model
  • Femtosecond laser
  • Two-temperature model

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