Feasibility study of plasma poping on Si substrates with photo-resist patterns

Issui Aiba*, Yuichiro Sasaki, Katsumi Okashita, Hideki Tamura, Yotaro Fukagawa, Kazuo Tsutsui, Hiroyuki Ito, Kuniyuki Kakushima, Bunji Mizuno, Hiroshi Iwai

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

6 Scopus citations
Original languageEnglish
Title of host publicationExtended Abstracts of the Fifth International Workshop on Junction Technology, 2005
Pages71-72
Number of pages2
StatePublished - 2005
Event5th International Workshop on Junction Technology, 2005 - Osaka, Japan
Duration: 7 Jun 20058 Jun 2005

Publication series

NameExtended Abstracts of the Fifth International Workshop on Junction Technology, 2005
Volume2005

Conference

Conference5th International Workshop on Junction Technology, 2005
CountryJapan
CityOsaka
Period7/06/058/06/05

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