Feasibility study of plasma poping on Si substrates with photo-resist patterns

Issui Aiba; Yuichiro Sasaki; Katsumi Okashita; Hideki Tamura; Yotaro Fukagawa; Kazuo Tsutsui; Hiroyuki Ito; Kuniyuki Kakushima; Bunji Mizuno; Hiroshi Iwai

Feasibility study of plasma poping on Si substrates with photo-resist patterns

Issui Aiba^*, Yuichiro Sasaki, Katsumi Okashita, Hideki Tamura, Yotaro Fukagawa, Kazuo Tsutsui, Hiroyuki Ito, Kuniyuki Kakushima, Bunji Mizuno, Hiroshi Iwai

^*Corresponding author for this work

International College of Semiconductor Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

6 Scopus citations

Original language	English
Title of host publication	Extended Abstracts of the Fifth International Workshop on Junction Technology, 2005
Pages	71-72
Number of pages	2
State	Published - 2005
Event	5th International Workshop on Junction Technology, 2005 - Osaka, Japan Duration: 7 Jun 2005 → 8 Jun 2005

Publication series

Name	Extended Abstracts of the Fifth International Workshop on Junction Technology, 2005
Volume	2005

Conference

Conference	5th International Workshop on Junction Technology, 2005
Country	Japan
City	Osaka
Period	7/06/05 → 8/06/05

Cite this

Aiba, I., Sasaki, Y., Okashita, K., Tamura, H., Fukagawa, Y., Tsutsui, K., Ito, H., Kakushima, K., Mizuno, B., & Iwai, H. (2005). Feasibility study of plasma poping on Si substrates with photo-resist patterns. In Extended Abstracts of the Fifth International Workshop on Junction Technology, 2005 (pp. 71-72). [1598672] (Extended Abstracts of the Fifth International Workshop on Junction Technology, 2005; Vol. 2005).

Aiba, Issui ; Sasaki, Yuichiro ; Okashita, Katsumi ; Tamura, Hideki ; Fukagawa, Yotaro ; Tsutsui, Kazuo ; Ito, Hiroyuki ; Kakushima, Kuniyuki ; Mizuno, Bunji ; Iwai, Hiroshi. / Feasibility study of plasma poping on Si substrates with photo-resist patterns. Extended Abstracts of the Fifth International Workshop on Junction Technology, 2005. 2005. pp. 71-72 (Extended Abstracts of the Fifth International Workshop on Junction Technology, 2005).

@inproceedings{340c0cde94464db7b522c7aa91997cd3,

title = "Feasibility study of plasma poping on Si substrates with photo-resist patterns",

author = "Issui Aiba and Yuichiro Sasaki and Katsumi Okashita and Hideki Tamura and Yotaro Fukagawa and Kazuo Tsutsui and Hiroyuki Ito and Kuniyuki Kakushima and Bunji Mizuno and Hiroshi Iwai",

year = "2005",

language = "English",

isbn = "4990215869",

series = "Extended Abstracts of the Fifth International Workshop on Junction Technology, 2005",

pages = "71--72",

booktitle = "Extended Abstracts of the Fifth International Workshop on Junction Technology, 2005",

note = "null ; Conference date: 07-06-2005 Through 08-06-2005",

}

Aiba, I, Sasaki, Y, Okashita, K, Tamura, H, Fukagawa, Y, Tsutsui, K, Ito, H, Kakushima, K, Mizuno, B & Iwai, H 2005, Feasibility study of plasma poping on Si substrates with photo-resist patterns. in Extended Abstracts of the Fifth International Workshop on Junction Technology, 2005., 1598672, Extended Abstracts of the Fifth International Workshop on Junction Technology, 2005, vol. 2005, pp. 71-72, 5th International Workshop on Junction Technology, 2005, Osaka, Japan, 7/06/05.

Feasibility study of plasma poping on Si substrates with photo-resist patterns. / Aiba, Issui; Sasaki, Yuichiro; Okashita, Katsumi; Tamura, Hideki; Fukagawa, Yotaro; Tsutsui, Kazuo; Ito, Hiroyuki; Kakushima, Kuniyuki; Mizuno, Bunji; Iwai, Hiroshi.

Extended Abstracts of the Fifth International Workshop on Junction Technology, 2005. 2005. p. 71-72 1598672 (Extended Abstracts of the Fifth International Workshop on Junction Technology, 2005; Vol. 2005).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Feasibility study of plasma poping on Si substrates with photo-resist patterns

AU - Aiba, Issui

AU - Sasaki, Yuichiro

AU - Okashita, Katsumi

AU - Tamura, Hideki

AU - Fukagawa, Yotaro

AU - Tsutsui, Kazuo

AU - Ito, Hiroyuki

AU - Kakushima, Kuniyuki

AU - Mizuno, Bunji

AU - Iwai, Hiroshi

PY - 2005

Y1 - 2005

UR - http://www.scopus.com/inward/record.url?scp=33747690528&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:33747690528

SN - 4990215869

SN - 9784990215866

T3 - Extended Abstracts of the Fifth International Workshop on Junction Technology, 2005

SP - 71

EP - 72

BT - Extended Abstracts of the Fifth International Workshop on Junction Technology, 2005

Y2 - 7 June 2005 through 8 June 2005

ER -

Feasibility study of plasma poping on Si substrates with photo-resist patterns

Publication series

Conference

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