Fast multiphoton microfabrication of freeform polymer microstructures by spatiotemporal focusing and patterned generation

Y. C. Li*, L. C. Cheng, C. H. Lien, C. Y. Chang, W. C. Yen, Shean-Jen Chen

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

One of the limits of a conventional multiphoton microfabrication is its low throughput due to the sequential nature of scanning process. In this study, a multiphoton microfabrication system based on spatiotemporal focusing and patterned excitation has been developed to provide freeform polymer microstructures fast. The system integrates a 10 kHz repetition rate ultrafast amplifier featuring strong instantaneous peak power (maximum 400 μJ/pulse at 90 fs pulse width) with a digital micromirror device generating designed patterns at the focal plane. As the result, three-dimensional freeform polymer microstructures using Rose Bengal as the photoinitiator are created by sequentially stacking up two-dimensional (2D) structures layer-by-layer. The size of each 2D fabrication area can be larger than 100 × 100 μm2. Compared with scanning process or fixed mask pattern generation, this approach provides two-or three-fold fabrication speed and freeform microstructures. Furthermore, the system is capable of optical sectioning the fabricated microstructures for providing 3D inspection.

Original languageEnglish
Title of host publicationPolymer Optics and Molded Glass Optics
Subtitle of host publicationDesign, Fabrication, and Materials II
DOIs
StatePublished - 1 Dec 2012
EventPolymer Optics and Molded Glass Optics: Design, Fabrication, and Materials II - San Diego, CA, United States
Duration: 15 Aug 201216 Aug 2012

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8489
ISSN (Print)0277-786X

Conference

ConferencePolymer Optics and Molded Glass Optics: Design, Fabrication, and Materials II
CountryUnited States
CitySan Diego, CA
Period15/08/1216/08/12

Keywords

  • Microstructure
  • Multiphoton microfabrication
  • Patterned generation
  • Spatiotemporal focusing

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