Failure analysis of Gate-all-around Nanowire Field Effect Transistor under TLP test

Guoyan Zhang, Aihua Dong, Nie Liu, Rui Tian, Xuejiao Yang, Zhiwei Liu, Kohui Lee, Horng-Chih Lin, Juin J. Liou, Wang Yuxin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Electrostatic discharge (ESD) characters of Nanowire Field Effect Transistors have been tested and analyzed in detail in this paper. TLP (transmission line pulsing technique) and semiconductor characterization system have been used for experiments. The failure currents and leakage currents of Nanowire Field Effect Transistor are characterized. Also, physical insights and failure model are provided to analyze the failure mechanism.

Original languageEnglish
Title of host publication2014 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781479923342
DOIs
StatePublished - 13 Mar 2014
Event2014 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2014 - Chengdu, China
Duration: 18 Jun 201420 Jun 2014

Publication series

Name2014 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2014

Conference

Conference2014 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2014
CountryChina
CityChengdu
Period18/06/1420/06/14

Keywords

  • Electrostatic discharge (ESD)
  • Failure analysis
  • Nanowire FET
  • TLP

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    Zhang, G., Dong, A., Liu, N., Tian, R., Yang, X., Liu, Z., Lee, K., Lin, H-C., Liou, J. J., & Yuxin, W. (2014). Failure analysis of Gate-all-around Nanowire Field Effect Transistor under TLP test. In 2014 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2014 [7061114] (2014 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2014). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/EDSSC.2014.7061114