Facile electroless deposition of zinc oxide ultrathin film for zinc acetate solution-processed transistors

Min Ching Chu, Hsin Chiang You, Jagan Singh Meena, Shao Hui Shieh, Chyi Yau Shao, Feng Chih Chang, Fu-Hsiang Ko*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

14 Scopus citations


A low-cost, ultra-thin, transparency and high-quality zinc oxide (ZnO) film was successfully demonstrated as the carrier transporting and semiconducting layer for thin-film transistor (TFT) devices. The ZnO ultra-thin film with 3.7 nm in thickness was spin-coated from zinc acetate sol-gel solution under electroless condition. The film structure was characterized by atomic force microscopy and x-ray diffraction spectroscopy, respectively. Among various processing temperatures, the electrical property of the fabricated TFT verified the devices could be successfully achieved from suitable annealing temperature of 300 to 700 °C. However, the higher treatment temperature of 800 to 900 °C deteriorated the transistor property due to the loss of oxygen vacancy. The electrical properties of these ZnO-based n-type TFTs were obtained as follows: the mobility (μ sat) ranged from 0.47 to 1.78 cm 2 V -1 s -1, the on/off current ratio ranged from 5.7 × 105 to 1.6 × 10 6, and the threshold voltage ranged from 9.7 to 17.3 V. The long-term (100 days) characterization for the evaluation of the ultra-thin ZnO TFT reliability on the mobility and on/off current ratio strongly suggested the effectiveness of solution-processed ultra-thin film transistors. This proposed efficient sol-gel solution method to fabricate transparent ZnO ultra-thin film was relatively simple and cost-effective technique, and could be used as a new candidate of material for next-generation electronic devices to meet the growing demand of small feature bioelectronic sensor, light emitting diode and flexible panel.

Original languageEnglish
Pages (from-to)5977-5989
Number of pages13
JournalInternational Journal of Electrochemical Science
Issue number7
StatePublished - 1 Jul 2012


  • Long-term reliability
  • Sol-gel solution
  • Thin-film transistor
  • Ultra-thin film
  • Zinc oxide

Fingerprint Dive into the research topics of 'Facile electroless deposition of zinc oxide ultrathin film for zinc acetate solution-processed transistors'. Together they form a unique fingerprint.

Cite this