Fabry-Perot interferometer embedded in a glass chip fabricated by femtosecond laser

Cheng Hsiang Lin, Lan Jiang, Hai Xiao, Yen Hsin Chai, Shean-Jen Chen, Hai Lung Tsai*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

22 Scopus citations

Abstract

We report a simple Fabry-Perot interferometer (FPI) embedded in a glass chip, which is capable of precisely measuring the refractive indices of liquid samples. The microdevice is the integration of a single-mode optical fiber and a microchannel in the photosensitive glass fabricated by femtosecond laser followed by thermal treatment, wet etching, and annealing. The function of the FPI is demonstrated by measuring the refractive indices of water and methanol. The interference visibility is more than 4.0 dB, which is sufficient for most sensing applications. This refractive index sensor with rigid structure could be further integrated to become a more complex 3D lab-on-a-chip for reliable biomedical applications.

Original languageEnglish
Pages (from-to)2408-2410
Number of pages3
JournalOptics Letters
Volume34
Issue number16
DOIs
StatePublished - 15 Aug 2009

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