Fabrication of the crystalline ITO pattern by picosecond laser with a diffractive optical element

C. W. Chien, Chung-Wei Cheng*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Abstract

This study presents the fabrication of crystalline indium tin oxide (c-ITO) patterns on glass sub-strate using laser-induced crystallization followed by chemical etching. In the proposed approach, an amorphous ITO (a-ITO) thin film was transformed into a c-ITO structure over a predetermined area using infrared picosecond fiber laser irradiation with a 500 kHz repetition rate, under a single laser beam or multiple laser beams by diffractive optical elements (DOE). The residual a-ITO thin film was removed by an etchant solution, in order to form a uniform c-ITO pattern. The formation was due to the heat accumulation effect provided by the high-repetition rate of picosecond laser pulses.

Original languageEnglish
Pages (from-to)165-169
Number of pages5
JournalJournal of Laser Micro Nanoengineering
Volume8
Issue number2
DOIs
StatePublished - 2 Oct 2013

Keywords

  • Crystalline
  • Doe
  • Ito
  • Picosecond laser

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