Fabrication of microstructure arrays on photosensitive glass by femtosecond laser

P. N. Wan, Chung-Wei Cheng*, H. W. Huang, J. S. Chen

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Scopus citations


A maskless technique for the fabrication of U-shaped microstructure arrays on the surface of photosensitive glass by femtosecond laser-induced modification is developed. This technique is followed by heat treatment to crystallize the modified area, and the specimen is then placed in acid solution for chemical etching. The surface roughness of the microstructures is further improved by a secondary annealing process. The fabricated photosensitive glass is used as a mold template, and replicated plano-convex cylindrical arrays by UV-replica are also presented. The focusing ability of the microlens arrays on the glass mold and replicate is demonstrated.

Original languageEnglish
Pages (from-to)122-125
Number of pages4
JournalJournal of Laser Micro Nanoengineering
Issue number1
StatePublished - 1 Feb 2012


  • Femtosecond laser
  • Microlens arrays
  • Microstructures
  • Photosensitive glass
  • UV curing

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