Fabrication of microlens arrays in photosensitive glass by femtosecond laser direct writing

C. H. Lin, L. Jiang, Y. H. Chai, H. Xiao, Shean-Jen Chen, H. L. Tsai

Research output: Contribution to journalArticlepeer-review

59 Scopus citations

Abstract

This article reports the fabrication of high-fill-factor plano-convex cylindrical and spherical microlens arrays horizontally and vertically embedded in a photosensitive Foturan glass chip by femtosecond (fs) laser micromachining. The microlens arrays were fabricated by modifying the microstructure of Foturan glass using fs laser direct writing followed by thermal treatment, wet etching, and additional annealing. The focusing ability and image quality of the microlens arrays were examined, showing that the lens arrays not only can focus light well but also provide an imaging capability that holds great potential for lab-on-a-chip applications.

Original languageEnglish
Pages (from-to)751-757
Number of pages7
JournalApplied Physics A: Materials Science and Processing
Volume97
Issue number4
DOIs
StatePublished - 1 Dec 2009

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