This study investigated the experiments utilizing MEMS (Micro Electro-Mechanical Systems) technology to fabricate a micro PEMFC (Proton Exchange Membrane Fuel Cell). The work uses MEMS technology to fabricate flow field plates which includes PVD (Physical Vapor Deposition) and CVD (Chemical Vapor Deposition), PR coating (photo resist), exposure, development, dry etching and wet etching. The components of micro PEMFC include end plates, flow field plates, current collector plates, gaskets, GDL (Gas Diffusion Layer), PEM (Proton Exchange Membrane) and catalyst. After assembling single cells, the test performed experimentally for micro PEMFC with various parameters, including three shapes of current collector plates, three different open area ratios of flow field plates, different air supply conditions and different oxidants. These oxidants include pure oxygen and air. Final, the work will discuss and compare the differences of micro PEMFC performances on experimental data.