Fabrication of Large-Scale High-Mobility Flexible Transparent Zinc Oxide Single Crystal Wafers

Yi Cheng Chen, Yu Hao Tu, Li Wei Chen, Yu Hong Lai, Meng Fu Tsai, Ying Xiu Lin, Hou Chou Lai, Ching Yu Chiang, Heng Jui Liu, Hsin Che Pan, Tzu Yi Yang, Dawei Zhang, Jan Seidel, Jyh Ming Wu, Yu Lun Chueh, Wen-Hao Chang, Ching Shun Ku, Shih Hsun Chen, Li Chang, Ying Hao Chu*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

Single crystal wafers, such as silicon, are the fundamental carriers of advanced electronic devices. However, these wafers exhibit rigidity without mechanical flexibility, limiting their applications in flexible electronics. Here, we propose a new approach to fabricate 1.5 in. flexible functional zinc oxide (ZnO) single crystal wafers with high electron mobility (>100 cm2 V-1 s-1) and optical transparency (>80%) by a combination of thin-film deposition, a chemical solution method, and surficial treatment. The uniformity of the flexible single crystal wafers is examined by an advanced scanning X-ray diffraction technique and photoluminescence spectroscopy. The transport properties of ZnO flexible single crystal wafers retain their pristine states under various bending conditions, including cyclability and endurability. This approach demonstrates a breakthrough in the fabrication of the flexible single crystal wafers for future flexible optoelectronic applications.

Original languageEnglish
JournalACS Applied Materials and Interfaces
DOIs
StateAccepted/In press - 2021

Keywords

  • CMP
  • flexible
  • hydrothermal
  • single crystal
  • zinc oxide

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