Fabrication of high-performance poly-si thin-film transistors with sub-lithographic channel dimensions

Ko Hui Lee*, Horng-Chih Lin, Tiao Yuan Huang

*Corresponding author for this work

Research output: Contribution to journalArticle

Abstract

A method for fabrication of tri-gate polycrystalline silicon (poly-Si) transistors with short channel length and width is proposed and demonstrated without employing costly lithographic tools. Specifically, the method employs a spacer formation technique to extend source and drain regions so as to scale down the channel length below sub-lithographic dimension. Concurrently, the channel width is scaled down below sub-lithographic dimension by using a photoresist (PR) trimming technique. Our results show that the reduction in the planar channel width is essential for suppressing the short-channel effects. Finally, devices with channel length of 120 nm and planar channel width of 110 nm are demonstrated with superior electrical characteristics in terms of small subthreshold swing (146 mV/dec) and low drain-induced-barrier-lowing value (100 mV/V).

Original languageEnglish
Article number6847114
Pages (from-to)966-970
Number of pages5
JournalIEEE/OSA Journal of Display Technology
Volume10
Issue number11
DOIs
StatePublished - 1 Nov 2014

Keywords

  • Lithography
  • poly-Si
  • thin-film transistor (TFT)
  • tri-gate
  • trimming

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